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• NEW POWER PLASMA

Matching Network

• Product Overview
• RPG
• RF Generator
• Matching Network

• Matching Network

  
  
  The Impedance Matching Network is a device to supply the maximum RF power of high efficiency from the RF generator to the process chamber and match the electrical impedance of the chamber changing by process to the output impedance (50 Ohm) of the RF generator in real time.

• Product Features

     Full digital matcher

    High power delivery efficiency

    Dual frequency matching operation

    Reflected power : Less than 1% for forward power

    Preset repeatability : ±1% highest compatibility for I/O

• Item		SEMI	DISPLAY	SOLAR
  CVD/PVD	PECVD
  	PEALD
  	LPCVD
  	PVD
  DRY ETCH	POLY
  	METAL
  	OXIDE/NITRIDE
  	PR STRIP
  Volume		~10kW	10kW~	~10kW
  Frequency		400kHZ, 13.56MHz, 2MHz, 60MHz	13.56MHz, 3.2MHz	13.56MHz