RPG
We present various product groups of New Power Plasma.RPG
Product Features
Item | CVD | ALD/LPCVD | DRY ETCH | |||
---|---|---|---|---|---|---|
Semi | Display | Semi | Display | Semi | Display | |
PECVD | ||||||
PEALD | ||||||
HDPCVD | ||||||
LPCVD | ||||||
METAL ETCH | ||||||
MACHER | ||||||
PR STRIP |
Item | Product | Physical | Application Process | ||
---|---|---|---|---|---|
NF3 Gas | Power | Single Body | Separate Module | ||
SEMI | 6 slm | 10kW | PECVD | ||
7 slm | 10kW | ||||
8 slm | 10kW | ||||
9 slm | 10kW | ||||
14 slm | 15kW | HDP CVD , PEALD, ALD | |||
Display | 36 slm | 18kW/20kW | PECVD | ||
45 slm | 22kW | ||||
60 slm | 30kW |
New Power Plasma
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Tel. +82-31-612-7600Jeon-Ju Factory
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