RF Generator
The RF Generator is a device to supply high-frequency power to the process chamber to form process plasma in the process equipment(CVD, Dry Etcher) which is a core for production of thin solar cells and LCDs. This is a converter device to receive the AC power of 3P 220V, 400V, 440V or 480V which is the commercial power(frequency: 50/60Hz) supplied generally from the LCD production factory and convert it into high frequencies of usually 13.56MHz or higher, and is used as a RF power source.
As the patterns of semiconductor circuits are miniaturized and three-dimensional zed recently, the processes become very complicated to use various frequencies(2MHz, 3.2MHz, 13.56MHz, 27.12MHz, 60MHz) and various functions(pulse, frequency variation), and the semiconductor ALD and CVD process uses RF power of 1~3kW output with multiple cutting-edge functions. In addition, to increase yields in processes, this requires additional functions corresponding or the requirements such as suppression of arcing generated during processes, minimization of matching time and reflected power, monitoring of chamber environment changing during processes, and confrontation against instantaneous power outages.