RPG
뉴파워프라즈마의 신뢰성높은 제품군을 소개합니다.RPG
제품특징
구분 | CVD | ALD/LPCVD | DRY ETCH | |||
---|---|---|---|---|---|---|
Semi | Display | Semi | Display | Semi | Display | |
PECVD | ![]() |
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PEALD | ![]() |
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HDPCVD | ![]() |
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LPCVD | ![]() |
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METAL ETCH | ![]() |
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MACHER | ![]() |
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PR STRIP | ![]() |
구분 | Product | Physical | Application Process | ||
---|---|---|---|---|---|
NF3 Gas | Power | Single Body | Separate Module | ||
SEMI | 6 slm | 10kW | ![]() |
PECVD | |
7 slm | 10kW | ![]() |
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8 slm | 10kW | ![]() |
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9 slm | 10kW | ![]() |
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14 slm | 15kW | ![]() |
HDP CVD , PEALD, ALD | ||
Display | 36 slm | 18kW/20kW | ![]() |
PECVD | |
45 slm | 22kW | ![]() |
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60 slm | 30kW | ![]() |